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Volumn 11, Issue 7, 2001, Pages 869-897
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A platform for micropositioning based on piezo legs
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Author keywords
Micropositioning; Piezo actuators; Platform
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Indexed keywords
ACTUATORS;
ELECTRODES;
HARMONIC ANALYSIS;
MICROCONTROLLERS;
MOTION CONTROL;
POLARIZATION;
SCANNING ELECTRON MICROSCOPY;
PIEZO TUBES;
PIEZOELECTRIC DEVICES;
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EID: 0035480067
PISSN: 09574158
EISSN: None
Source Type: Journal
DOI: 10.1016/S0957-4158(00)00059-3 Document Type: Article |
Times cited : (41)
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References (19)
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