Nanoimprint lithography for optical components

Proceedings of 2007 9th International Conference on Transparent Optical Networks, ICTON 2007

Volumn 2, Issue , 2007, Pages 194-197

  Scarpa, Giuseppe ^b   Brunetti, Francesca ^b   Harrer, Stefan ^b   Lugli, Paolo ^a,b  

^a IEEE

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Nanofabrication; Nanoimprint lithography; Optical devices; Sub wavelength gratings; Waveguide gratings

Indexed keywords

DIFFRACTION GRATINGS; INNOVATION; OPTICAL DATA PROCESSING; OPTICAL DEVICES; OPTICAL FILTERS; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; PHOTONIC CRYSTALS; WAVEGUIDES;

ENHANCED PERFORMANCES; HIGH RESOLUTIONS; HIGH THROUGHPUTS; LOW COSTS; NANOFABRICATION; NEW TECHNIQUES; OPTICAL COMPONENTS; SUB-WAVELENGTH GRATINGS; WAVEGUIDE GRATINGS; WAVELENGTH FILTERS;

NANOIMPRINT LITHOGRAPHY;

EID: 48349142555     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICTON.2007.4296178     Document Type: Conference Paper

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