Material properties measurement and numerical simulation for characterization of ultra-low-power consumption hotplates

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1661-1664

  Cozzani, E ^a   Roncaglia, A ^a   Zampolli, S ^a   Elmi, I ^a   Mancarella, F ^a   Tamarri, F ^a   Cardinali, G C ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

FEM modeling; Hotplate; Power consumption; Thermal conductivity

Indexed keywords

ACTUATORS; ATMOSPHERIC PRESSURE; ATMOSPHERICS; COMPUTER SIMULATION; ELECTRIC POWER UTILIZATION; FINITE ELEMENT METHOD; MICROSYSTEMS; SENSORS; THERMODYNAMIC PROPERTIES; THICK FILMS; THREE DIMENSIONAL; TRANSDUCERS;

3-D MODELING; EXPERIMENTAL CURVES; FEM MODELING; FINITE ELEMENTS; HEATING POWER; HOT-PLATES; HOTPLATE; INTERNATIONAL CONFERENCES; MATE RIAL PROPERTIES; NUMERICAL SIMULATIONS; ON CHIPS; POWER CONSUMPTION; SIMULATED RESULTS; SOLID-STATE SENSORS; SUSPENDED STRUCTURES; TEST STRUCTURES; THERMAL CONDUCTIVITY; THERMAL PROPERTIES; THIN FILMS; ULTRA-LOW-POWER; VACUUM CHAMBERS;

MODEL STRUCTURES;

EID: 48349113885     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300469     Document Type: Conference Paper

References (7)

1. S. Zampolli, I. Elmi, E. Piras et al.: "Integration of gas sensors in flexible circuits: towards a flexible tag microlab for food logistics", Eurosensors XIX, Barcelona, Spain (2005)
2. I. Elmi, S. Zampolli, E. Cozzani et al.: "Development of ultra-low-power consumption hotplates for gas sensing applications", IEEEsensors V, Daegu, South Korea (2006).
3. M. Von Arx, O.Paul, H. Baltes: "Process-dependent thin film conductivities for thermal CMOS MEMS", Journal of Microelectromechanical Systems, vol. 9, pp. 136-145, 2000
4. N. Sabaté, J. Santander, I. Gràcia et al.: "Thermal conductivity determination of micromachined membranes", 2005 Spanish Conference on Electron Devices, Proceedings 2005, pp. 229-232.
5. F. Mancarella, A. Roncaglia, M. Passini et al.: "Wafer-level testing of thermopile IR detectors", IEEE Sensors 2005 Proceedings, p. 1133-1136, Irvine, U.S.A. (2005)
6. S. Hafizovic, O. Paul: "Temperature-dependent thermal condctivities of CMOS layers by micromachined thermal van der Pauw test structures", Sensors and Actuators A 97-98, pp.246-252, 2002.
7. E.Centurioni: "Generalized matrix method for calculation of internal light energy flux in mixed coherent and incoherent multilayers", Applied Optics, Vol. 44, No. 35 , pp 7532-7539, 2005.