Thermal conductivity determination of micromachined membranes

2005 Spanish Conference on Electron Devices, Proceedings

Volumn 2005, Issue , 2005, Pages 229-232

  Sabate N ^a   Santander, J ^a   Gracia I ^a   Fonseca, L ^a   Cabruja, E ^a   Cane C ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION TECHNOLOGIES; FLOW SENSOR; MICROMACHINED MEMBRANES; RESISTIVE ELEMENTS;

ELECTRIC CONDUCTIVITY; HEAT LOSSES; MICROMACHINING; SENSORS; THERMAL CONDUCTIVITY; THIN FILM CIRCUITS; THIN FILMS;

MICROELECTRONICS;

EID: 33745725888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SCED.2005.1504364     Document Type: Conference Paper

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