Radical-mediated adsorption: Ozone oxidation of passivated silicon

Surface Science

Volumn 602, Issue 14, 2008, Pages

  Fink, Christian K ^a   Jenkins, Stephen J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Hydrogen passivation; Hydrotrioxy; Ozone; Silicon oxidation; Surface radical

Indexed keywords

ADSORPTION; AIR POLLUTION; CHEMICAL OXYGEN DEMAND; HYDROGEN; MOLECULAR DYNAMICS; OXIDATION; OZONE; PASSIVATION; QUANTUM CHEMISTRY;

(100) SILICON; FIRST-PRINCIPLES MOLECULAR DYNAMICS; INITIAL OXIDATION; OZONE OXIDATION;

DYNAMICS;

EID: 48149092281     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2008.05.028     Document Type: Article

References (29)

1. Anghel A.T., et al. Phys. Rev. B 71 (2005) 113410
2. Kazor A., and Boyd I.W. Appl. Phys. Lett. 63 (1993) 2517
3. Nishiguchi T., et al. Appl. Phys. Lett. 81 (2002) 2190
4. Kurokawa A., et al. Appl. Phys. Lett. 76 (2000) 493
5. Nakamura K., and Ichimura S. Jpn. J. Appl. Phys. 44 (2005) 7602
6. Kurokawa A., and Ichimura S. Appl. Surf. Sci. 100/101 (1996) 436
7. Cui Z., and Takoudis C.G. J. Electrochem. Soc. 150 (2003) G694
8. Kurokawa A., et al. Jpn. J. Appl. Phys. 43 (2004) 281
9. Mayne A., et al. Prog. Surf. Sci. 81 (2006) 1
10. Segall M.D., et al. J. Phys. -Condes. Matter. 14 (2002) 2717
11. Head-Gordon M., et al. J. Phys. Chem. A 108 (2004) 10270
12. Willitsch S., et al. J. Chem. Phys. 122 (2005) 024311
13. Bulanin K., et al. J. Phys. Chem. 98 (1994) 5100
14. Jones G., Jenkins S.J., and King D.A. Surf. Sci. Lett. 600 (2006) L224
15. Suma K., Sumyoshi Y., and Endo Y. Science 308 (2005) 1885
16. Nelander B., Engdahl A., and Svensson T. Chem. Phys. Lett. 339 (2000) 403
17. Cacace F., et al. Science 285 (1999) 81
18. Schröder D. Angew. Chem. Intl. Ed. 41 (2002) 573
19. Xu X., Muller R.P., and Goddard III W.A. Proc. Natl. Acad. Sci. 99 (2002) 3376
20. Xu X., and Goddard III W.A. Proc. Natl. Acad. Sci. 99 (2002) 15308
21. Wentworth P., et al. Proc. Natl. Acad. Sci. 100 (2003) 1490
22. Sennikov P.G., Ignatov S.K., and Schrems O. Chem. Phys. Chem. 6 (2005) 392
23. Cooper P.D., Moore M.H., and Hudson R.L. J. Phys. Chem. A 110 (2006) 7985
24. Zheng W., Jewitt D., and Kaiser R.I. Phys. Chem. Chem. Phys. 9 (2007) 2556
25. Yang J., Li Q.S., and Zhang S. Phys. Chem. Chem. Phys. 9 (2007) 466
26. Dinger A., et al. Chem. Phys. Lett. 311 (1999) 202
27. Sriraman S., et al. Surf. Sci. 459 (2000) L475
28. Ramalingam S., et al. Surf. Sci. 418 (1998) L8
29. Plesnicar B., et al. J. Am. Chem. Soc. 120 (1998) 8005