Micro milling technologies for MEMS

Proceeding of the 3rd International Conference of Young Scientists "Perspective Technologies and Methods in MEMS Design", MEMSTECH 2007

Volumn , Issue , 2007, Pages 86-95

  Wang, Jinsheng ^a,b   Gong, Yadong ^a   Abba, Garbriel ^b   Cao, Jianfeng ^a   Shi, Jiashun ^a   Cai, Guangqi ^a  

^a NORTHEASTERN UNIVERSITY   (China)

^b UNIVERSITÉ DE LORRAINE   (France)

Author keywords

Cutting principles; MEMS; Micro milling; Microstructure; Minimum chip thickness

Indexed keywords

ASPECT RATIO; MACHINERY; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHOTORESISTS; TECHNOLOGY;

HIGH ASPECT RATIO STRUCTURES; KEY TECHNOLOGIES; LOW COSTS; MANUFACTURING TECHNOLOGIES; MICRO MILLING; MINIMUM CHIP THICKNESS; MONITORING DEVICES; WORK PIECES;

MILLING (MACHINING);

EID: 47849098055     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSTECH.2007.4283432     Document Type: Conference Paper

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