Modulation of TiSiN effective work function using high-pressure postmetallization annealing in dilute oxygen ambient

Applied Physics Letters

Volumn 92, Issue 26, 2008, Pages

  Lee, Joonmyoung ^a   Park, Hokyung ^a   Choi, Hyejung ^a   Hasan, Musarrat ^a   Jo, Minseok ^a   Chang, Man ^a   Lee, Byoung Hun ^b   Park, Chang Seo ^b   Kang, Chang Yong ^b   Hwang, Hyunsang ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ATMOSPHERICS; LOGIC GATES; METAL ANALYSIS; METALS; MODULATION; OXYGEN; PNEUMATIC CONTROL EQUIPMENT; PRESSURE; STEEL ANALYSIS; WORK FUNCTION;

(E ,3E) PROCESS; AMERICAN INSTITUTE OF PHYSICS (AIP); EFFECTIVE WORK FUNCTION (EWF); EQUIVALENT OXIDE THICKNESS (EOT); GATE STACKS; METAL GATES; POST METALLIZATION ANNEAL (PMA);

ANNEALING;

EID: 46649085890     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2953192     Document Type: Article

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