Copper cleaning in supercritical CO2 for the microprocessor interconnects

Microelectronic Engineering

Volumn 85, Issue 7, 2008, Pages 1629-1638

  Ventosa, C ^a   Rebiscoul D ^a   Perrut, V ^b   Ivanova, V ^a   Renault, O ^a   Passemard, G ^a  

^a DIF   (France)

^b RECIF Technologies   (France)

Author keywords

Diketones; Copper; Pitting corrosion; Post etch cleaning; Supercritical carbon dioxide

Indexed keywords

CLEANING; COPPER; CORROSION PREVENTION; MULTIPROCESSING SYSTEMS; PITTING;

PITTING CORROSION; POST-ETCH CLEANING; SUPERCRITICAL CARBON DIOXIDE;

CARBON DIOXIDE;

EID: 46549090058     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.03.018     Document Type: Article

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