Optical and electrical properties of ZnO films deposited by activated reactive evaporation

Vacuum

Volumn 82, Issue 11, 2008, Pages 1274-1279

  Yuvaraj, D ^a   Rao, K Narasimha ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Refractive index; Sheet resistance; Structural properties; ZnO films

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; EVAPORATION; OPTICAL CONSTANTS; REFRACTIVE INDEX; SHEET RESISTANCE; SILICON; STRUCTURAL PROPERTIES; ZINC OXIDE;

ACTIVATED REACTIVE EVAPORATION; OXYGEN PARTIAL PRESSURE;

OXIDE FILMS;

EID: 46549089004     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.03.043     Document Type: Article

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