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Volumn 79, Issue 6, 2008, Pages
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Surface resistivity estimation by scanning surface potential microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
FILM THICKNESS;
INERT GASES;
NICKEL;
NITROGEN;
SPUTTERING;
THICK FILMS;
ARGON ATMOSPHERES;
SCANNING SURFACE POTENTIAL MICROSCOPY (SSPM);
SURFACE RESISTIVITY;
THIN FILM THICKNESSES;
SURFACE POTENTIAL;
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EID: 46449112477
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2937647 Document Type: Article |
Times cited : (5)
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References (10)
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