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Volumn 79, Issue 6, 2008, Pages

Surface resistivity estimation by scanning surface potential microscopy

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; FILM THICKNESS; INERT GASES; NICKEL; NITROGEN; SPUTTERING; THICK FILMS;

EID: 46449112477     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2937647     Document Type: Article
Times cited : (5)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.