Fracture behaviour of single crystal silicon microstructures

Microsystem Technologies

Volumn 10, Issue 5, 2004, Pages 412-418

  Meroni, F Favalli ^a   Mazza, E ^a  

^a Institute of Mechanical Systems (IMES)   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; FAILURE ANALYSIS; FINITE ELEMENT METHOD; FRACTURE; MICROSTRUCTURE; SINGLE CRYSTALS; STRENGTH OF MATERIALS; STRESS ANALYSIS;

ELASTIC CONSTANTS; MICROMECHANICAL DEVICES; SINGLE CRYSTAL SILICON (SCSI);

SILICON;

EID: 4644293039     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0444-x     Document Type: Conference Paper

References (24)

1. Hok B; Gustafsson K (1985) Vibration analysis of micromechanical elements. Sensors Actuators 8:235-243
2. Weihs TP; Hong S; Bravman JC; Nix WD (1988) Mechanical deflection of cantilever microbeams - a new technique for testing the mechanical-properties of thin-films. J Mater Res 3:931-942
3. Johansson S; Ericson F; Sehweite JA (1989) Influence of surface-coatings on elasticity, residual-stresses, and fracture properties of silicon microelements. J Appl Phys 65:122-128
4. Sehweite JA (1992) Mechanical characterization of thin-films by micromechanical techniques. Mrs Bulletin 17:34-45
5. Mazza E; Dual J (1999) Mechanical behavior of a mu in-sized single crystal silicon structure with sharp notches. J Mech Phys Solids 47:1795-1821
6. Schiltges G; Dual J (2001) Failure behaviour of microstructures under torsional loads. J Mech Phys Solids 49:1021-1038
7. Wan SW; Dunn ML; Cunningham SJ; Read DT (1999) Elastic moduli, strength, and fracture initiation at sharp notches in etched single crystal silicon microstructures. J Appl Phys 85:3519-3534
8. Pearson GL; Read WT; Feldmann WL (1957) Deformation and fracture of small silicon crystals. Acta Metallurgica 5:181-191
9. Yi T; Kim CJ (1999) Measurement of mechanical properties for MEMS materials. Meas Sci Technol 10:706-716
10. Namaza T; Isono Y; Tanaka T (2000) Evaluation of size effect on mechanical properties of single crystal silicon by nano-scale bending test using AFM. J Microelectromechanical Syst 9:450-459
11. Sundararajan S; Bhushan B; Namazu T; Isono Y (2002) Mechanical property measurements of nanoscale structures using an atomic force microscope. Ultramicroscopy 91:111-118
12. Suwito W; Dunn ML; Cunningham SJ (1998) Fracture initiation at sharp notches in single crystal silicon. J Appl Phys 83:3574-3582
13. Fett T Failure of brittle materials near stress singularities. (1996) Engineering fracture Mechanics 53:511-518
14. ABAQUS Theory Manual, Version 6.2 edn. (2001) Hibbirt, Karlsson & Sorensen, Inc.
15. Seweryn A (2002) Modeling of singular stress fields using finite element method. Int T Solids Struct 39:4787-4804
16. Griffith AA (1968) Phenomena of rupture and flow in solids. Asm Trans Q 61:871
17. Haneman D (1987) Surfaces of silicon. Rep Prog Phys 50:1045-1086
18. Gilman JJ (1960) Direct measurements of the surface energies of crystals. T Appl Phys 31:2208-2218
19. Messmer C; Bilello JC; (1981) The surface-energy of Si, Gaas, and Gap. J Appl Phys 52:4623-4629
20. Enzler A; Herres N; Dommann A (2002) Analysis of etched cantilevers. Microelectronics Reliability 42:1807-1809
21. Elwenspoek M; Jansen HV (1998) Silicon Micromachining. Cambridge: Cambridge University Press
22. Williams ML (1952) Stress singularities resulting from various boundary conditions in angular corners of plates in extension. J Appl Mech-Trans Asme 19:526-528
23. Stroh AN (1962) Steady state problems in anisotropic elasticity. J Math Phys 41:77
24. Findler G; Muchow T; Koch M; Munzel H (1992) Temporal evolution of silicon surface-roughness during anisotropic etching processes presented at Ieee Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, New York