Mechanical behavior of a μm-sized single crystal silicon structure with sharp notches

Journal of the Mechanics and Physics of Solids

Volumn 47, Issue 8, 1999, Pages 1795-1821

  Mazza, E ^a   Dual, J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; APPROXIMATION THEORY; COMPUTATIONAL METHODS; CRYSTAL MICROSTRUCTURE; ELASTICITY; FAILURE ANALYSIS; FINITE ELEMENT METHOD; SINGLE CRYSTALS; STRESS CONCENTRATION; STRESS INTENSITY FACTORS; STRUCTURAL ANALYSIS;

SINGLE CRYSTAL SILICON MICROBARS; STROH FORMULA;

SEMICONDUCTING SILICON;

EID: 0032639898     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-5096(98)00112-4     Document Type: Article

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