Analysis of etched cantilevers

Microelectronics Reliability

Volumn 42, Issue 9-11, 2002, Pages 1807-1809

  Enzler, A ^a   Herres, N ^a   Dommann, A ^a  

^a Interstate University of Applied Sciences NTB Bucks   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BREAKING STRENGTH; FABRICATION PROCESS; FEM SIMULATIONS; SILICON BEAMS; SINGLE CRYSTALLINE SILICON;

FINITE ELEMENT METHOD;

EID: 4644291101     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(02)00235-4     Document Type: Article

References (2)

1. Mazza E and Dual J: Mechanical behavior of a μm-sized single crystal silicon structure with sharp notches. J. Mechanics and Physics of Solids 47 (1999) 1795-1821.
2. A. Kelly, N.H. Macmillan: Strong Solids (3rd edn) Clarendon Press, Oxford, UK, 1986.