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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 7 A, 2004, Pages 4207-4211

Characterization of micro-channels fabricated by in-water ablation of femtosecond laser pulses

(6) Iga, Yasunobu a Ishizuka, Tomohiko a Watanabe, Wataru a Itoh, Kazuyoshi a Li, Yan b Nishii, Junji c

a OSAKA UNIVERSITY (Japan)

b PEKING UNIVERSITY (China)

c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Femtosecond laser; Microchannel; Microdrilling; Micromachining; Silica glass

Indexed keywords

ASPECT RATIO; ETCHING; FUSED SILICA; LASER PULSES; MICROMACHINING; MICROMETERS; MORPHOLOGY; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SHOCK WAVES; TITANIUM;

FEMTOSECOND LASERS; INCIDENT ENERGY; MICRODRILLING; MICROFABRICATION;

MATERIALS SCIENCE;

EID: 4644255683 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.4207 Document Type: Article

Times cited : (34)

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