Quantitative measurements of charging in a gaseous environment

Scanning

Volumn 25, Issue 4, 2003, Pages 194-200

  Tang, Xiaohu ^a   Joy, David C ^a,b  

^a UNIVERSITY OF TENNESSEE   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Charging; Duane Hunt limit; Electron beam; Gaseous environment; X ray spectrum

Indexed keywords

ELECTRON BEAMS; INSULATING MATERIALS; SEMICONDUCTOR MATERIALS; X RAYS;

CHARGE ACCUMULATION;

ELECTRIC CHARGE;

ARTICLE; ATMOSPHERIC PRESSURE; ELECTRICITY; ELECTRON BEAM; ELECTRON MICROSCOPY; ENVIRONMENT; GAS; IRRADIATION; PRIORITY JOURNAL; QUANTITATIVE ANALYSIS; SEMICONDUCTOR; X RAY;

EID: 0042090703     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950250406     Document Type: Article

References (13)

1. - irradiated insulators. J Appl Phys 85, 1137-1147 (1999)
2. Danilatos GD: Foundations of environmental scanning electron microscopy. Adv Electron Electr Phys 71, 109-250 (1988)
3. Doehne E: A new correction method for high-resolution energy-dispersive x-ray analyses in the environmental scanning electron microscope. Scanning 19, 75-78 (1997)
4. Duane W, Hunt FL: On x-ray wavelengths. Proc Amer Phys Soc Vol VI, No. 2, 166-171 (1915)
5. Engel VA: Ionized Gases. Clarendon Press, Oxford (1965)
6. Fiori CE, Swyt CR, Myklebust RL: DTSA-Desk Top Spectrum Analyzer (US Patent 529913) (1992)
7. Moncrieff DA, Robinson VNE, Harris LB: Charge neutralization of insulating surfaces in the SEM by gas ionization. J Phys D: Appl Phys 11, 2315-2325 (1978)
8. Newbury DE: Diagnostics for assessing spectral quality for x-ray microanalysis in low voltage and variable pressure scanning electron microscopy. Proc M & M, 702-703 (2001)
9. Robinson VNE: The elimination of charging artefacts in the scanning electron microscope. J Phys E: Sci Instrum 8, 638-640 (1975a)
10. Shackelford JF, Alexander W: CRC materials Science and Engineering Handbook. CRC Press, Boca Raton (2001)
11. Thiel BL, Bache IC, Fletcher AL, Meredith P, Donald AM: An improved model for gaseous amplification in the environmental SEM. J Microsc, Pt. 3, 187, 143-157 (1997)
12. Toth M, Daniels DR, Thiel BL, Donald AM: Quantification of electron-ion recombination in an electron-beam-irradiated gas capacitor. J Phys D: Appl Phys 35, 1796-1804 (2002)
13. Yu XR, Hantsche H: Pressure dependence of the charging effect in monochromatized small spot x-ray photoelectron spectroscopy. J Electr Spectrosc Relat Phenom 50, 19-29 (1990)