Deposition and characterisation of niobium films for SRF cavity application

EUROCON 2007 - The International Conference on Computer as a Tool

Volumn , Issue , 2007, Pages 1170-1177

  Catani, L ^a   Cianchi, A ^a   Di Giovenale, D ^a   Lorkiewicz, J ^a   Merlo, V ^b   Polini, R ^b   Granata, C ^c   Russo, R ^a,c   Sadowski, M J ^d   Salvato, M ^b   Strzyzewski, P ^d   Tazzari, S ^a,b  

^a INFN SEZIONE DI ROMA TOR VERGATA   (Italy)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

^c CNR   (Italy)

^d SOLTAN INSTITUTE FOR NUCLEAR STUDIES   (Poland)

Author keywords

Cavity deposition; Niobium film; SRF cavities; Superconducting properties; UHVCA; Vacuum arc

Indexed keywords

ACCELERATION; BANDPASS FILTERS; CLADDING (COATING); COPPER; KETONES; MAGNETRONS; NIOBIUM; Q FACTOR MEASUREMENT; SPUTTER DEPOSITION; STANDARDS; STRUCTURAL PROPERTIES; SULFATE MINERALS; SUPERCONDUCTING FILMS; TRANSITION METALS; TRANSPORT PROPERTIES; VACUUM DEPOSITION;

(O-SEC.-BUTYLDITHIOCARBONATIO-S ,S') COPPER; (OTDR) TECHNOLOGY; (PL) PROPERTIES; APPLIED (CO); CATHODIC ARC DEPOSITION; CHARACTERISATION; DEPOSITION TECHNIQUES; INTERNATIONAL CONFERENCES; NIOBIUM (NB) FILMS; QUALITY FACTOR (Q FACTOR); RF CAVITIES; SPUTTERING TECHNIQUES; SRF CAVITIES; SUPERCONDUCTING RADIO FREQUENCY (SRF); ULTRA-HIGH VACUUM (UHV);

MAGNETRON SPUTTERING;

EID: 46149117008     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EURCON.2007.4400658     Document Type: Conference Paper

References (42)

1. H. Padamsee, Supercond. Sci. Technol. 14, R28-R51 (2001)
2. H.W. Weber, E. Seidl, C. Laa, E. Schachinger and M. Prohammer, Phys. Rev. B44, 14, 7585 (1991)
3. Weinstock, H.; Nisenoff, Martin Microwave Superconductivity, Proceedings of the NATO Advanced Study Institute, Millau, France, 29 August -10 September, 1999, Series: NATO Science Series E:, Vol. 375, Springer (2002)
4. C. Benvenuti, S. Calatroni, I.E. Campisi, P. Darriulat, M. Peck, R. Russo, and A.-M. Valente, Physica C 316, 153 (1999) and reference therein
5. http://www.linearcollider.org/
6. Kenji Saito, "Surface smoothness for high gradient Niobium sc rf cavities" Proceeding of the XI workshop on RF Superconductivity, Lubeck, 8-12 September, 2003 http://srf.desy.de/fap/paper/ThP15.pdf
7. L. Lilje et al, Improved surface treament of the superconducting Tesla cavities, Nuclear Instruments and Methods A 516, 213 (2004)
8. C. Benvenuti, N. Circelli, M. Hauer, Appl. Phys. Lett. 45, 583 (1984)
9. S. Myers, "High Energy Operation of LEP2" (CERN-SL-99-012-DI), Proceedings of the 1999 Particle Accelerator Conference - PAC '99 New York City, NY, USA.
10. C. Benvenuti, S. Calatroni, I.E. Campisi, P. Darriulat, M. Peck, R. Russo, and A.-M. Valente "Study of the surface resistance of niobium sputter-coated copper cavities " IEEE Trans. Appl. Superconduct. 9, 900-903 (1999)
11. C.Benvenuti et al. Physica C 321, 421-428 (2001), V. Arbet-Engels et al. Nucl. Instr. And Meth. NIM 463, 1-8 (2001)
12. Michael Alexander Peck, PHD thesis "Structural and superconducting properties of sputter-deposited niobium films for applications in RF accelerating cavities", Techn. Univ., Wien, 1999
13. S. Calatroni et al Proceeding of the XI workshop on RF Superconductivity, Lubeck, Germany, 8-12 September, 2003 http://srf.desy.de/fap/paper/WeO09.pdf
14. S. Calatroni, Proceeding of the XII workshop on RF Superconductivity, Cornell, USA, 10-15 July 2005, http://www.lns.cornell.edu/public/SRF2005/pdfs/ MoP11.pdf
15. Carmine Attanasio, Luigi Maritato, and Ruggero Vaglio, Phys. Rev.B 43, 6128-6131 (1991)
16. J. Halbritter, Supercond. Sci. Technol. 16 (2003) R47-R69
17. J. Halbritter, JAP 97 (2005) 083904 and reference therein
18. V. Palmieri, Proceeding of the XII Workshop on RF Superconductivity, Cornell, USA, 10-15 July 2005, http://www.lns.cornell.edu/public/SRF2005/pdfs/ TuA02.pdf.
19. V. Palmieri, paper presented at the International Workshop on Thin Films and New Ideas for Pushing the Limits of RF Superconductivity, Legnaro, Italy, 9-12 October, 2006, INFN Legnaro, Italy.
20. Lanza, G. et al., Proceeding of the XII Workshop on RF Superconductivity, Cornell, USA, 10-15 July 2005, http://www.lns.cornell.edu/public/SRF2005/pdfs/ TuA12.pdf.
21. André Anders, Vacuum 67,673-686 (2002)
22. R. Russo, J. Langner, L. Catani, M. Cirillo, V. Merlo, S. Tazzari, F. Tazzioli, Proc. X Workshop on RF Superconductivity, Tsukuba, Japan, 6-11 September, 2001, http://conference.kek.jp/SRF2001/TL012.pdf
23. R. Russo, L. Catani, A. Cianchi, J. Langner, S. Tazzari, Supercond. Sci. Technol. 18, L41 (2005)
24. R. Russo et al., Surface Coating and Technology 201, 3987-3992 (2006)
25. G. Wu, L. Phillips, R. Sundelin, T. Goodman, Proc. X Workshop on RF superconductivity, Tsukuba, Japan, 6-11 Sept, 2001, http://conference.kek.jp/ SRF2001/MA003.pdf
26. G. Wu et al., Thin Solid Films 489, 56 (2005)
27. J.P. Carbotte, Rev.Mod. Phys. 62, 1027 (1990) and references therein
28. R. Vaglio, C. Attanasio, L. Maritato, and A. Ruosi, Phys. Rev. B 47, 15302-15303 (1993)
29. C. Attanasio, et al. Journal of Physics: Condensed Matter, 13, 3215-3521 (2001)
30. Neil W. Ashcroft, N. David Mermin, Solid State Physics, Holt, Rinehart and Winston, New York, 1976
31. C. Benvenuti, S. Calatroni, P. Chiggiato, M. Marino, R. Russo, Proc. of the VII Workshop on RF Superconductiviy, Gif sur Yvette, France, 17-20 October, 1995, p.473
32. C. Benvenuti, et al. "Properties of copper cavities coated with niobium using different discharge gases" Proceedings of the VIII Workshop on RF Superconductivity, Abano Terme, Italy, 6-10 October, 1997
33. G. Heim and E. Kay, J. Appl. Phys. 46 (1975) 4006 and references therein.
34. R.Russo, S. Sgobba "Influence of the coating temperature on the properties of niobium films". Particle Accelerators Vol. 60, 135-145 (1998)
35. G.K. Williamson and W.H. Hall, Acta Cryst. 1, 22 (1953)
36. D. S. Rickerby, A. M. Jones and B. A. Bellamy, Surf. Coat. Technol. 37, 111 (1989)
37. J. A. Thornton, D. W. Hoffman, Thin Solid Films, 171, 5 (1989)
38. G. Mueller paper presented at CARE06 Annual Meeting, INFN-LNF, Frascati, Italy, 15-17 November 2006 http://www.lnf.infh.it/conference/care06/
39. R. Russo et al, paper presented The International Workshop on Thin Films and New Ideas for Pushing the Limits of RF Superconductivity, INFN Legnaro, Italy, 9-12 October, 2006 (to be published)
40. Tonini, D., et al., "Morphology of niobium films sputtered at different sputtering target-substrate angle" in Proc. of 11th Workshop on RF Superconductivity, 2003, edited by D. Proch. S. Cattarin, M. Musiani, V. Palmieri, D. Tonini, Electrochimica Acta 51, 1745-1751 (2006)
41. G. Keppel, M. Musiani, N. Patron, V. Palmieri, D. Tonini, G. Torzo, "Comparison between morphology of superconducting niobium films deposited by magnetron sputtering and cathodic vacuum arc", at XVII Congresso Associazione Italiana del Vuoto, 28/06 - 02/07, 2004, Palazzo del Cinema, Venezia, ed. Compositori, Bologna
42. A. Cianchi, et al. "Novel Development on Superconducting Niobium Film Deposition for RF Applications", Proc. of EPAC 2006, pp. 457-459, Edinburgh (UK), June 2006, http://oraweb.cern.ch/pls/epac06/toc.htm, session MOPCH, paperMOPCH168.pdf