SCOPUS 정보 검색 플랫폼

EPAC 2006 - Contributions to the Proceedings

Volumn , Issue , 2006, Pages 457-459

Novel development on superconducting niobium film deposition for RF applications

(12) Cianchi, A a Catani, L a Di Giovenale, D a Lorkiewicz, J a Ruggiero, B b Russo, R b Langner, J c Sadowski, M c Strzyzewski, P c Merlo, V d Salvato, M d Tazzari, S d

a INFN SEZIONE DI ROMA (Italy)

b CNR (Italy)

c SOLTAN INSTITUTE FOR NUCLEAR STUDIES (Poland)

d UNIVERSITY OF ROME TOR VERGATA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

IONIZATION OF GASES; SAPPHIRE;

DEPOSITION SYSTEMS; DEPOSITION TECHNOLOGY; METALLIC THIN FILMS; PLASMA TRANSPORT; RF APPLICATIONS; SAPPHIRE SUBSTRATES; SUBSTRATE SURFACE; SUPERCONDUCTING NIOBIUM FILMS;

DEPOSITION;

EID: 84898799369 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (2)

References (9)

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- High quality superconducting niobium films produced by an ultrahigh vacuum cathodic arc in supercond
- R. Russo, L Catani, A. Cianchi, S. Tazzari, J.Langner, "High quality superconducting niobium films produced by an ultrahigh vacuum cathodic arc" in Supercond. Sci. Technol. 18 (2005) L41-L44
- (2005) Sci. Technol , vol.18
- Russo, R.¹ Catani, L.² Cianchi, A.³ Tazzari, S.⁴ Langner, J.⁵

2
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- Research on initiation of ULTRA-highvacuum arc discharges applied for deposition of thin superconducting layers
- Warsaw, Poland
- Langner J et al. "Research on initiation of ULTRA-highvacuum arc discharges applied for deposition of thin superconducting layers" Proc. Int. Symp. PLASMA-2003 on Research and Application of Plasmas(Warsaw, Poland)
- Proc. Int. Symp. PLASMA-2003 on Research and Application of Plasmas
- Langner, J.¹

3
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- Martins D R, SalvadoriM C, Verdonck P and Brown I G 2002 Appl. Phys. Lett. 81 1969
- (2002) Appl. Phys. Lett , vol.81 , pp. 1969
- Martins, D.R.¹ Salvadorim, C.² Verdonck, P.³ Brown, I.G.⁴

4
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- Morphology of niobium films sputtered at different target-substrate angle
- Lubeck (Germany)
- D. Tonini, et al., Morphology of niobium films sputtered at different target-substrate angle Proceedings of 11th Workshop on RF superconductivity, Lubeck (Germany) 2003
- (2003) Proceedings of 11th Workshop on RF Superconductivity
- Tonini, D.¹

5
- 22644448879
- Novel metallization technique for filling 100-nm-wide trenches and vias with very high aspect ratio
- May/Jun
- O. R. Monteiro, "Novel metallization technique for filling 100-nm-wide trenches and vias with very high aspect ratio ",J. Vac. Sci. Technol. B 17.3, May/Jun 1999
- (1999) J. Vac. Sci. Technol. B , vol.17 , Issue.3
- Monteiro, O.R.¹

6
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- UHV arc deposition for RF superconducting cavity:samples characterization
- Warsaw, Poland
- A. Cianchi, et al. "UHV arc deposition for RF superconducting cavity:samples characterization" Proc. Int. Symp. PLASMA-2003 on Research and Application of Plasmas( Warsaw, Poland)
- Proc. Int. Symp. PLASMA-2003 on Research and Application of Plasmas
- Cianchi, A.¹

7
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- Magnetic filters in UHV arcdischarges: Constructions, field modelling and tests of efficiency
- P. Strzyzewski, et al., "Magnetic filters in UHV arcdischarges: constructions, field modelling and tests of efficiency", Phys. Scr. T123 (2006) 135-139
- (2006) Phys. Scr , vol.T123 , pp. 135-139
- Strzyzewski, P.¹

8
- 84898819009
- http://www.ansoft.de/products/em/max2d

9
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- Andrè Anders, Appl. Phys. Lett. 85, (2004) 6137
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- Anders, A.¹

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