Rutherford backscattering spectrometry characterization of nanoporous chalcogenide thin films grown at oblique angles

Journal of Analytical Atomic Spectrometry

Volumn 23, Issue 7, 2008, Pages 981-984

  Martin Palma R J ^a   Redondo Cubero, A ^b,c   Gago, R ^b,d   Ryan, J V ^a   Pantano, C G ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

^c UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^d INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY COMPOUNDS; BACKSCATTERING; CHALCOGENIDES; DEPOSITION; EVAPORATION; FILM GROWTH; GERMANIUM COMPOUNDS; OPTICAL PROPERTIES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SELENIUM COMPOUNDS; SPECTROMETRY;

CHALCOGENIDE THIN FILMS; DEPOSITION ANGLE; GROWTH MODELING; INCORPORATION RATES; RUTHERFORD BACKSCATTERING SPECTROMETRY; SMALL VARIATIONS; SUBSTRATE ROTATION; THIN FILM DENSITIES;

THIN FILMS;

EID: 46149105952     PISSN: 02679477     EISSN: 13645544     Source Type: Journal    
DOI: 10.1039/b716815b     Document Type: Article

References (17)

1. K. Robbie M. J. Brett A. Lakhtakia Nature (London) 1996 384 616
2. K. Robbie M. J. Brett J. Vac. Sci. Technol., A 1997 15 1460
3. R. Messier V. C. Venugopal P. D. Sunal J. Vac. Sci. Technol., A 2000 18 4 1538
4. A. Lakhtakia and R. Messier, in Sculptured Thin Films. Nanoengineered morphology and optics, SPIE, Bellingham, 2005
5. M. H. Hawkeye M. J. Brett J. Vac. Sci. Technol., A 2007 25 5 1317
6. T. Karabacak G.-C. Wang T.-M. Lu J. Appl. Phys. 2003 94 12 7723
7. Y.-P. Zhao D.-X. Ye G.-C. Wang T.-M. Lu Proc. SPIE 2003 5219 59
8. J. J. Steele M. J. Brett J. Mater. Sci. 2007 18 367
9. J. V. Ryan M. Horn A. Lakhtakia C. G. Pantano Proc. SPIE 2004 5593 643
10. K. A. Cerqua-Richardson J. M. McKinley B. Lawrence S. Joshi A. Villeneuve Opt. Mater. 1998 10 155
11. A. Ganjoo, N. Yoshida and K. Shimakawa, in Recent research developments in applied physics, ed., M. Kawasaki, N. Ashgriz, and, R. Anthony, Research Signpost, 1998
12. A. Ganjoo H. Jain C. Yu R. Song J. V. Ryan J. Irudayaraj Y. J. Ding C. G. Pantano J. Non-Cryst. Solids 2006 352 584
13. H. Nishihara, M. Haruna and T. Suhara, in Opt. Electro - Opt. Series, 215, ed., R. E. Fisher, and, W. E. Smith, McGraw-Hill, New York, 1989, p. 151
14. E. Kótai Nucl. Instrum. Methods Phys. Res., Sect. B 1994 85 588
15. Handbook of modern ion beam material analysis, ed. J. R. Tesmer and M. Nastasi, MRS, Pittsburg, 1995
16. R. J. Martin-Palma J. V. Ryan C. G. Pantano J. Vac. Sci. Technol., A 2007 25 3 587
17. R. N. Tait T. Smy M. J. Brett Thin Solid Films 1993 226 196