Characterization of sculptured thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5593, Issue , 2004, Pages 643-649

  Ryan, Joseph V ^a   Horn, Mark ^a   Lakhtakia, Akhlesh ^a   Pantano, Carlo G ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA ACQUISITION; ELECTRON BEAMS; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; QUARTZ; SCANNING ELECTRON MICROSCOPY; TITANIUM DIOXIDE;

BRUNAUER-EMMETT-TELLER (BET) THEORY; NITROGEN ADSORPTION; QUARTZ CRYSTAL MICROBALANCE (QCM); SCULPTURED THIN FILMS (STF);

THIN FILMS;

EID: 17044424239     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.573910     Document Type: Conference Paper

References (11)

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