The effect of residual stress on pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 1117-1120

  Sadeghian, Hamed ^a   Rezazadeh, Ghader ^a   Abbaspour, Ebrahim ^a   Tahmasebi, A ^a   Hosainzadeh, I ^b  

^a URMIA UNIVERSITY   (Iran)

^b Khoy Azad University   (Iran)

Author keywords

Electrostatic pressure; MEMS; Pull in voltage; Residual stress; Varying section

Indexed keywords

(ABIOTIC AND BIOTIC) STRESS; APPLIED (CO); DISTRIBUTED MODELLING; ELECTROSTATIC PRESSURE; EULER-BERNOULLI BEAM THEORY; FABRICATION PROCESSES; INTERNATIONAL CONFERENCES; MEM SWITCHES; MOLECULAR SYSTEMS; PULL IN VOLTAGES; STRESS CHANGES;

ELECTROSTATICS; MOLECULES; NEMS; NONLINEAR EQUATIONS; OPTICAL DESIGN; PHOTOACOUSTIC EFFECT; RESIDUAL STRESSES;

STRENGTH OF MATERIALS;

EID: 46149087768     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334644     Document Type: Conference Paper

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