Development and optimization of microcantilever based IR imaging arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6940, Issue , 2008, Pages

  Hunter, Scott R ^a   Maurer, Gregory S ^a   Simelgor, Gregory ^a   Radhakrishnan, Shankar ^a   Gray, D John ^a   Bachir, Ken ^a   Pennell, Thomas ^a   Bauer, Martin ^a   Jagadish, Usha ^a  

^a Multispectral Imaging Inc   (United States)

Author keywords

Bimorph; Imager; Infrared; MEMS; Sensor; Surface micromachining; Thermal

Indexed keywords

(+ MOD 2N) OPERATION; DESIGN REQUIREMENTS; DYNAMIC RANGE (DR); FOCAL PLANES; IMAGING ARRAYS; INDIVIDUAL (PSS 544-7); INFRARED (IR); INFRARED SENSITIVITY; INFRARED TECHNOLOGIES; MICRO CANTILEVER SENSORS; MICRO CANTILEVERS; MULTI SPECTRAL IMAGING; NOISE IMMUNITY; OPTICAL MODELLING; OPTICAL RESONANT; PERFORMANCE MEASUREMENT (QUALITY); PIXEL ARRAYS; PROTOTYPING; REAL WORLD; RESONANT FREQUENCIES; RESPONSE TIMES; SENSOR CAPACITANCES; SENSOR STRUCTURES; STRUCTURAL RIGIDITIES;

AEROSPACE APPLICATIONS; ARCHITECTURAL DESIGN; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; DETECTORS; DYNAMIC PROGRAMMING; FOCAL PLANE ARRAYS; FOCUSING; FREQUENCY RESPONSE; INDUSTRIAL MANAGEMENT; INFRARED RADIATION; IRIDIUM; LEAD; MULTITASKING; NATURAL FREQUENCIES; OPTICAL DESIGN; OPTICAL ENGINEERING; OPTIMIZATION; PIXELS; PRODUCT DEVELOPMENT; SEMICONDUCTOR MATERIALS; SENSORS; SHAPE OPTIMIZATION; STRUCTURAL OPTIMIZATION; TECHNOLOGY;

IMAGING TECHNIQUES;

EID: 45549103374     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.771652     Document Type: Conference Paper

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