Fabrication of polysilicon surface micromachined MEMs structures

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 2001, Pages 163-166

  Munger, K ^a   Fuller, L F ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROSTATIC ACTUATORS; ETCHING; FABRICATION; MICROMACHINING; POLYSILICON;

SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035172758     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Micromechanics and MEMs
2. Microelectronic engineering: A new program at Rochester institute of technology
3. A new program at RIT: Master of engineering in microelectronics manufacturing engineering
4. A multi-project MEMS lecture and laboratory course
5. MEMS activity at Rochester institute of technology