Stability of a micromechanical pull-in voltage reference

IEEE Transactions on Instrumentation and Measurement

Volumn 52, Issue 2, 2003, Pages 457-460

  Rocha, Luis A ^a   Cretu, Edmond ^a,b   Wolffenbuttel, Reinoud F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Melexis ^*  (Belgium)

Author keywords

DC voltage reference; Microelectromechanical systems (MEMS); Pull in stability; Reproducibility

Indexed keywords

ELASTIC MODULI; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; TEMPERATURE MEASUREMENT; THERMAL EXPANSION; THICKNESS MEASUREMENT;

DC VOLTAGE REFERENCE; MICROMECHANICAL PULL-IN VOLTAGE REFERENCE; ON-CHIP VOLTAGE REFERENCE; REPRODUCIBILITY;

VOLTAGE MEASUREMENT;

EID: 0037899519     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2003.810007     Document Type: Article

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