A simulation study of dispatching rules and rework strategies in semiconductor manufacturing

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2004, Pages 325-329

  Kuhl, Michael E ^a   Laubisch, Gregory R ^a  

^a Rochester Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENCHMARKING; COMPUTER SIMULATION; DECISION THEORY; LITHOGRAPHY; PRODUCTIVITY; ROBUSTNESS (CONTROL SYSTEMS); STRATEGIC PLANNING; THROUGHPUT;

CUTTING EDGES; DISPATCHING RULES; SEMICONDUCTOR MANUFACTURING; SIMULATION STUDIES;

SEMICONDUCTOR MATERIALS;

EID: 4544279493     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

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