A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Zr(Hf) silicate alloys

Surface Science

Volumn 566-568, Issue 1-3 PART 2, 2004, Pages 772-776

  Lucovsky, G ^a   Rayner, G B ^a   Kang, D ^a   Hinkle, C L ^a   Hong, J G ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Alloys; Crystallization; Dielectric phenomena; Surface chemical reaction

Indexed keywords

CRYSTALLIZATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHASE SEPARATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; SURFACE REACTIONS; THICK FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

CMOS DEVICES; CRYSTALLINITY; DIELECTRIC PHENOMENON; SURFACE CHEMICAL REACTIONS;

ZIRCONIA;

EID: 4544248613     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2004.06.010     Document Type: Article

References (7)

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2. Rayner G.B. Jr., Kang D., Zhang Y., Lucovsky G. J. Vac. Sci. Technol. B. 20:2002;1748.
3. Maria J.P., Wicaksana D., Kingon A.I., Busch B., Schulte H., Garfunkel E., Gustafsson T. J. Appl. Phys. 90:2001;3476.
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5. Wilk G.D., Wallace R.W., Anthony J.M. J. Appl. Phys. 89:2001;5243.
6. Lucovsky G., Rayner G.B. Jr., Kang D., Appel G., Johnson R.S., Zhang Y., Sayers D.E., Ade H., Whitten J.L. Appl. Phys. Lett. 79:2001;1775.
7. Rayner G.B. Jr., Kang H., Lucovsky G. J. Vac. Sci. Technol. B. 21:2003;1783.