Spherical bistable micromechanism

Journal of Mechanical Design

Volumn 130, Issue 4, 2008, Pages

  Lusk, Craig P ^a   Howell, Larry L ^b  

^a University of South Florida   (United States)

^b Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-STABLE; BISTABLES; MICROMECHANISMS; MIRROR ARRAY; OPTICAL MIRROR; OUT-OF-PLANE; OUT-OF-PLANE ORIENTATION; POWER; SMALL DISTURBANCES;

DESIGN;

EID: 45149114015     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2885079     Document Type: Article

References (25)

1. Yeow, T.-W., Law, K. L., and Goldenberg, A., 2001, "MEMS Optical Switches," IEEE Commun. Mag., 39(11), pp. 158-163.
2. Hui, E. E., Howe, R. T., and Rodgers, M. S., 2000, "Single-Step Assembly of Complex 3-D Microstructures," in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), Miyazaki, Japan, Jan. 23-27, pp. 602-607.
3. Chang, H.-A., Tsay, J., and Sung, C.-K., 2001, "Design of a Fully Compliant Bistable Micromechanism for Switching Devices," Proc. SPIE, 4593, pp. 97-108.
4. Kruglick, E. J. J., and Pister, K. S. J., 1998, "Bistable MEMS Relays and Contact Characterization," IEEE Solid-State Sensor and Actuator Workshop Hilton Head Island, SC, June 8-11, pp. 333-337.
5. Prasad, J., and Diaz, A. R., 2006, "Synthesis of Bistable Periodic Structures Using Topology Optimization and a Genetic Algorithm," ASME J. Mech. Des., 128, pp. 1298-1306.
6. Parkinson, M. B., Jensen, B. D., and Roach, G. M., 2000, "Optimization-Based Design of a Fully-Compliant Bistable Micromechanism," ASME Proceedings of Design Engineering Technical Conferences and Computer Information in Engineering Conference, Paper No. DETC2000/MECH-14119.
7. Jensen, B. D., Howell, L. L., and Salmon, L. G., 1999, "Design of Two-Link In-Plane, Bistable Compliant Micro-Mechanisms," ASME J. Mech. Des., 121, pp. 416-423.
8. Halg, B., 1990, "On a Nonvolatile Memory Cell Based on Micro-Electro-Mechanics," Proceedings IEEE Workshop on MEMS, pp. 172-176.
9. Sulfridge, M., Saif, T., Miller, N., and O'Hara, K., 2002, "Optical Actuation of a Bistable MEMS," J. Microelectromech. Syst., 11(5), 574-593.
10. Michael, A., Yu, K., and Kwok, C. Y., 2004, "Theoretical Analysis of Initially Buckled, nermally Actuated, and Snapping Bimorph Micro Bridge," Proc. SPIE, 5276, pp. 540-547.
11. Sun, X., Farmer, K. R., and Carr, M. N., 1998, "A Bistable Microrelay Based on Two-segment Multimorph Cantilever Actuators," Proceedings IEEE Workshop on MEMS, pp. 154-159.
12. Foulds, I., Trinh, M., Hu, S., Liao, S., Johnstone, R., and Parameswaran, M., 2002, "A Surface Micromachined Bistable Switch, Proceedings of the 2002 IEEE Canadian Conference on Electrical and Computer Engineering, pp. 465-469.
13. Yu, K., Michael, A., and Kwok, C. Y., 2004, "A Novel Bistable Thermally actuated Snap-Through Actuator for Out-of-Plane Deflection," Proc. SPIE, 5276, pp. 442-450.
14. Jensen, B. D., and Howell, L. L., 2000, "Identification of Compliant Pseudo-Rigid-Body Mechanism Configurations Resulting in Bistable Behavior," Proceedings of the ASME 2000 Design Engineering Technical Conferences, Baltimore, Sept., Paper No. DETC2000/ MECH-14147.
15. Chiang, C. H., 1988, Kinematics of Spherical Mechanisms, Cambridge University Press, New York.
16. Lusk, C. P., and Howell, L. L., 2005, "Components, Building Blocks and Demonstrations of Spherical Mechanisms for Microelectromechanical Systems," Proceedings of the Design Engineering Technical Conferences, Long Beach, CA, Sept., Paper No. DETC2005/MECH-84672.
17. Baker, M. S., and Howell, L. L., 2002, "On-Chip Actuation of an In-Plane Compliant Bistable, Micromechanism," J. Microelectromech. Syst., 11(5), pp. 566-573.
18. Koester, D. A., Mahadevan, R., Hardy, B., and Markus, K. W., 2001, MUMPs Design Handbook, Cronos Integrated Microsystems, Research Triangle Park, NC.
19. Pister, K. S. J., Judy, M., Burgett, S., and Fearing, S., 1992, "Microfabricated Hinges," Sens. Actuators, A, 33(3), 249-256.
20. Howell, L. L., 2001, Compliant Mechanisms, Wiley, New York.
21. McCarthy, J. M., 2000, Geometric Design of Linkages, Springer, New York.
22. Hammond, J. R., 1943, Concise Spherical Trigonometry, Houghton Mifflin Company, New York.
23. Henderson, D. W., 2001, Experiencing Geometry: In Euclidean, Spherical, and Hyperbolic Spaces, 2nd ed., Prentice-Hall, Upper Saddle River, NJ.
24. Paul, B., 1979, Kinematics and Dynamics of Planar Machinery, Prentice-Hall, Englewood Cliffs, NJ.
25. Erdman, A. G., and Sandor, G. N., 1997, Mechanism Design: Analysis and Synthesis, 3rd ed., Prentice-Hall, Englewood Cliffs, NJ, Vol. 1.