Design of a fully compliant bistable micromechanism for switching devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4593, Issue , 2001, Pages 97-108

  Chang, Hsin An ^a   Tsay, Jinni ^a   Sung, Cheng Kuo ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Bistable mechanism; Compliant mechanism; Switching devices

Indexed keywords

COMPOSITE MICROMECHANICS; PROBES; SCANNING ELECTRON MICROSCOPY; SWITCHING SYSTEMS; TOPOLOGY;

SWITCHING DEVICES;

MICROELECTRONICS;

EID: 0035768535     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448840     Document Type: Conference Paper

References (6)

1. Parkinson, M.B., Jensen, B.D. and Roach, G.M., "Optimization-Based Design of a Fully-Compliant Bistable Micromechanism," ASME Proceedings of Design Engineering Technical Conferences and Computer Information in Engineering Conference, DETC2000/MECH-14119, 2000.
2. Halg, B., "On a Nonvolatile Memory Cell Based on Micro-electro-mechanics," Proceedings IEEE Workshop on MEMS, pp. 172-176, 1990.
3. Sun, X., Farmer, K.R. and Carr, M.N., "A Bistable Microrelay Based on Two-segment Multimorph Cantilever Actuators," Proceedings IEEE Workshop on MEMS, pp. 154-159, 1998.
4. Erdman, A.G., Modern Kinematics - Developments in the Last Forty Years, John Wiley and Sons, 1993.
5. Web Site: http://www-personal.engine.umich.edu/~Kota/mems.html.
6. MUMPs™ Design Handbook, Web Site: http://www.memsrus.com/cronos/CIMSmain2ie.html.