A novel bistable thermally actuated snap-through actuator for out of plane deflection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5276, Issue , 2004, Pages 442-450

  Yu, K ^a   Michael, A ^a   Kwok, C Y ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Bistable; Bridge; Buckling; Out of plane deflection; Snap through; Two way actuation

Indexed keywords

BOUNDARY CONDITIONS; BUCKLING; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; POLYSILICON; RESIDUAL STRESSES; SILICON; THERMOANALYSIS;

BISTABLE; BRIDGE; OUT-OF-PLANE DEFLECTION; SNAP-THROUGH; THERMAL MOMENT; TWO-WAY ACTUATION;

MICROACTUATORS;

EID: 2442623239     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.523272     Document Type: Conference Paper

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