High rate reactive magnetron sputter deposition of titanium oxide

Applied Physics Letters

Volumn 92, Issue 22, 2008, Pages

  Kubart, T ^a   Depla, D ^b   Martin, D M ^a   Nyberg, T ^a   Berg, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; REACTIVE SPUTTERING; TITANIUM; TITANIUM OXIDES;

EXPERIMENTAL STUDIES; HIGH RATES; REACTIVE MAGNETRON SPUTTERING; SYSTEMATIC (CO);

SPUTTER DEPOSITION;

EID: 44849129472     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2938054     Document Type: Article

References (15)

1. T. Nyberg, S. Berg, U. Helmersson, and K. Hartig, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1906333 86, 164106 (2005).
2. D. Severin, O. Kappertz, T. Kubart, T. Nyberg, S. Berg, A. Pflug, M. Siemers, and M. Wuttig, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2196048 88, 161504 (2006).
3. W. D. Sproul, D. J. Christie, and D. C. Carter, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2005.05.022 491, 1 (2005).
4. H. Ohsaki, Y. Tachibana, A. Mitsui, T. Kamiyama, and Y. Hayashi, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(01)01023-9 392, 169 (2001).
5. Y. Hoshi and T. Takahashi, IEICE Trans. Electron. IELEEJ 0916-8524 E87, 227 (2004).
6. N. N. Grenwood and A. Earnshaw, Chemistry of the Elements, 2nd ed. (Butterworth-Heinemann, London, 1997).
7. D. Depla, S. Heirwegh, S. Mahieu, J. Haemers, and R. J. De Gryse, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2404583 101, 013301 (2007).
8. S. Berg and T. Nyberg, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2004.10.051 476, 215 (2005).
9. S. Hashimoto, A. Tanaka, A. Murata, and T. Sakurada, Surf. Sci. SUSCAS 0039-6028 10.1016/j.susc.2004.03.002 556, 22 (2004).
10. J. F. Ziegler, J. P. Biersack, and M. D. Ziegler, SRIM, the stopping and range of ions in matter, Ziegler Scientific Company, 2006.
11. W. Eckstein and W. Moller, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 7-8, 727 (1985).
12. R. Kelly, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/S0168-583X(86)80063-5 18, 388 (1986).
13. E. Dullni, Appl. Phys. A: Solids Surf. APSFDB 0721-7250 10.1007/BF00620464 38, 131 (1985).
14. G. V. Samsonov, The Oxide Handbook, 2nd ed. (IFI-Plenum, New York, 1982).
15. E. Dullni, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/0168-583X(84)90276-3 2, 610 (1984).