Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations

Computational Materials Science

Volumn 43, Issue 1, 2008, Pages 59-64

  Kovács, Á ^a   Kovacs A ^b   Mescheder, U ^b  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^b FURTWANGEN UNIVERSITY   (Germany)

Author keywords

Critical pressure; Microsieve; Silicon nitride membrane

Indexed keywords

COMPUTER SIMULATION; ELASTICITY; FINITE ELEMENT METHOD; FRACTURE TOUGHNESS; LOAD LIMITS; PERFORATING;

CRITICAL PRESSURE; MICROSIEVES; SILICON NITRIDE MEMBRANES;

SILICON NITRIDE;

EID: 44649186240     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.commatsci.2007.07.023     Document Type: Article

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