SCOPUS 정보 검색 플랫폼

Volumn 26, Issue 3, 2008, Pages 934-938

Ion beam machining of Si layer deposited on Zerodur® substrate

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; NATURAL FREQUENCIES; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS;

IMPINGING IONS; ION BEAM MACHINING; LAYER DEPOSITION; UNPROCESSED SURFACES;

SURFACE MICROMACHINING;

EID: 44649103192 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2907779 Document Type: Article

Times cited : (3)

References (11)

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