Si nanocrystals formation by a new ion implantation device

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 10, 2008, Pages 2486-2489

  Lorusso, A ^a   Nassisi, V ^a   Velardi, L ^b   Congedo, G ^a  

^a Department of Physics   (Italy)

^b UNIVERSITY OF BARI   (Italy)

Author keywords

Faraday cup; Ion implantation; Laser produced plasma; Silicon nanocrystals

Indexed keywords

ION BEAMS; ION IMPLANTATION; LASER PRODUCED PLASMAS; SILICON COMPOUNDS;

FARADAY CUP; SILICON NANOCRYSTALS;

NANOCRYSTALS;

EID: 44449155697     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.030     Document Type: Article

References (15)

1. Boody F.P., Hopfel R., Hora H., and Kelly J.C. Laser Part. Beams 14 (1996) 443
2. Torrisi L., Gammino S., Mezzasalma A.M., Badziak J., Parys P., Wolowski J., Woryna E., Krása J., Láska L., Pfeifer M., Rohlena K., and Boody F.P. Appl. Surf. Sci. 217 (2003) 319
3. Krása J., Láska L., Rohlena K., Peřina V., and Hnatowicz V. Laser Part. Beams 20 (2002) 109
4. Gammino S., Torrisi L., Andò L., Ciavola G., Celona L., Láska L., Krása J., Pfeifer M., Rohlena K., Woryna E., Wolowski J., Paris P., and Shirkov G.D. Rev. Sci. Instr. 73 (2002) 650
5. Chen X.Y., Lu Y.F., Wu Y.H., Cho B.J., Liu M.H., Dai D.Y., and Song W.D. J. Appl. Phys. 93 (2003) 6311
6. Pavesi L., Mazzoleni C., Tredicucci A., and Pellegrini V. Appl. Phys. Lett. 67 (1995) 3280
7. Shi G., Xu G., and Han G. Mater. Lett. 61 (2007) 463
8. Tong S., Liu X., and Bao X. Appl. Phys. Lett. 66 (1995) 469
9. Qi B., Gilgenbach R.M., Lau Y.Y., Johnston M.D., Lian J., Wang L.M., Doll G.L., and Lazarides A. Appl. Phys. Lett. 78 (2001) 3785
10. Qi B., Lau Y.Y., and Gilgenbach R.M. Appl. Phys. Lett. 78 (2001) 706
11. Qi J.B., Gilgenbach R.M., Jones M.C., Johnston M.D., Lau Y.Y., Wang L.M., Lian J., Doll G.L., and Lazarides A. Appl. Phys. 93 (2003) 8876
12. Ross G.G., Barba D., and Martin F. Int. J. Nanotechnol. (2006)
13. Ghislotti G., Nielsen B., Asoka-Kumar P., Lynn K.G., Szeles C., Bottani C.E., Bertoni S., Cerofolini G.F., and Meda L. Thin Solid Films 276 (1996) 310
14. Nassisi V., and Pedone A. Rev. Sci. Instr. 74 (2003) 68
15. J.F. Ziegler, J.P. Biersack, Software SRIM - 2003, .