Laser-driven ion source for reduced-cost implantation of metal ions for strong reduction of dry friction and increased durability

Laser and Particle Beams

Volumn 14, Issue 3, 1996, Pages 443-448

  Boody, Frederick P ^a   Höpfl, Reinhard ^a   Hora, Heinrich ^a,b   Kelly, Jak C ^b  

^a Institute of Technology   (Germany)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COLLIDING BEAM ACCELERATORS; CURRENT DENSITY; DURABILITY; ELECTRON BEAMS; ELECTRON CYCLOTRON RESONANCE; FRICTION; ION IMPLANTATION; LASER PRODUCED PLASMAS; MICROELECTRONICS; SURFACE TENSION;

ELECTRON BEAM ION SOURCES; LARGE HADRON COLLIDER; LASER ION SOURCE; METAL ION;

ION SOURCES;

EID: 0030383925     PISSN: 02630346     EISSN: None     Source Type: Journal    
DOI: 10.1017/s0263034600010132     Document Type: Article

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