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Applied Physics Letters

Volumn 78, Issue 6, 2001, Pages 706-708

Extraction of ions from the matrix sheath in ablation-plasma ion implantation

(3) Qi, Bo a Lau, Y Y a Gilgenbach, R M a

a UNIVERSITY OF MICHIGAN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003951042 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1343842 Document Type: Article

Times cited : (17)

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