Effects of adhesion layers on the ferroelectric properties of lead zirconium titanate thin films deposited on silicon nitride coated silicon substrates

Thin Solid Films

Volumn 516, Issue 18, 2008, Pages 6052-6057

  Zohni, Omar ^a   Buckner, Gregory ^a   Kim, Taeyun ^a   Kingon, Angus ^a   Maranchi, Jeff ^b   Siergiej, Richard ^b  

^a North Carolina State University   (United States)

^b BETTIS ATOMIC POWER LABORATORY   (United States)

Author keywords

Adhesion; Electrical properties and measurements; PZT; Silicon nitride; Tantalum

Indexed keywords

ADHESION; CURRENT VOLTAGE CHARACTERISTICS; DEPOSITION; FERROELECTRICITY; LEAD COMPOUNDS; SILICON NITRIDE; SOL-GEL PROCESS;

ADHESION LAYERS; CAPACITANCE-VOLTAGE (C-V) CHARACTERISTICS; LEAD ZIRCONIUM TITANATE (PZT); SILICON NITRIDE COATED SUBSTRATES; ZIRCONIUM DIOXIDE;

THIN FILMS;

EID: 44449099802     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.130     Document Type: Article

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