Ion irradiation effects on surface mechanical behavior and shrinkage of hybrid sol-gel derived silicate thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 10, 2008, Pages 2453-2456

  Ghisleni, R ^a   Lucca, D A ^a   Wang, Y Q ^b   Lee, J K ^c   Nastasi, M ^c   Dong, J ^d   Mehner, A ^d  

^a Oklahoma State University   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

^d STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK   (Germany)

Author keywords

Hardness; Hybrid organic inorganic; Ion irradiation; Nanoindentation; Sol gel

Indexed keywords

FILM THICKNESS; HEAT TREATMENT; ION BOMBARDMENT; NANOINDENTATION; SILANES; SOL-GEL PROCESS;

ION IRRADIATION EFFECTS; SILICATE THIN FILMS; SURFACE MECHANICAL BEHAVIOR; TETRAETHYLORTHOSILICATE (TEOS);

THIN FILMS;

EID: 44449090498     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.020     Document Type: Article

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