High precision diamond machining of hybrid sol-gel coatings

Journal of Sol-Gel Science and Technology

Volumn 35, Issue 3, 2005, Pages 245-251

  Datchary, W ^a   Mehner, A ^a   Zoch, H W ^a   Lucca, D A ^b   Klopfstein, M J ^b   Ghisleni, R ^b   Grimme, D ^a   Brinksmeier, E ^a  

^a STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK   (Germany)

^b OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

Diamond machining; Hybrid sol gel coating; Nanoindentation; Spin coating

Indexed keywords

ARRAYS; COATINGS; CUTTING; DIAMOND CUTTING TOOLS; MACHINING; OPTICAL DEVICES; OPTICAL INSTRUMENT LENSES; SILICON WAFERS; SPIN COATING; SUBSTRATES; VELOCITY;

DIAMOND MACHINING; HYBRID SOL-GEL COATINGS; MACHINING PARAMETERS; NANOINDENTATION;

SOL-GELS;

EID: 24144435361     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-005-1835-x     Document Type: Article

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