Effects of ion irradiation on the structural transformation of sol-gel derived TEOS/MTES thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 10, 2008, Pages 2457-2460

  Lucca, D A ^a   Ghisleni, R ^a   Lee, J K ^b   Wang, Y Q ^c   Nastasi, M ^b   Dong, J ^d   Mehner, A ^d  

^a Oklahoma State University   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

^d STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK   (Germany)

Author keywords

FT IR; Hybrid organic inorganic; Ion irradiation; Raman spectroscopy; Sol gel

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYBRID MATERIALS; ION BOMBARDMENT; RAMAN SPECTROSCOPY; SILICON COMPOUNDS; SOL-GEL PROCESS; SPIN COATING;

METHYLTRIETHOXYSILANE (MTES); TETRAETHYLORTHOSILICATE (TEOS);

THIN FILMS;

EID: 44449152924     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.022     Document Type: Article

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