Effects of ion implantation on the surface mechanical properties of sol-gel derived TEOS/MTES thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 577-580

  Lucca, D A ^a   Ghisleni, R ^a   Nastasi, M ^b   Shao, L ^b,c   Wang, Y Q ^b   Dong, J ^d   Mehner, A ^d  

^a Oklahoma State University   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c Texas AandM University   (United States)

^d STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK   (Germany)

Author keywords

Hardness; Hybrid organic inorganic; Ion implantation; Nanoindentation; Sol gel

Indexed keywords

ELASTIC MODULI; ION IMPLANTATION; MECHANICAL PROPERTIES; NANOINDENTATION; SOL-GEL PROCESS; SPIN COATING; SYNTHESIS (CHEMICAL);

DEPTH PROFILES; ELECTRONIC STOPPING; SILICATE THIN FILMS; TETRAETHYLORTHOSILICATE (TEOS);

THIN FILMS;

EID: 33947691526     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.062     Document Type: Article

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