Effects of heat treatment and ion irradiation on hybrid organic/inorganic sol-gel derived thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 261, Issue 1-2 SPEC. ISS., 2007, Pages 708-710

  Ghisleni, R ^a   Shao, L ^b,c   Lucca, D A ^a   Doan, V ^a   Nastasi, M ^b   Dong, J ^d   Mehner, A ^d  

^a Oklahoma State University   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c Department of Electrical and Computer Engineering   (United States)

^d STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK   (Germany)

Author keywords

Heat treatment; Hybrid organic inorganic; Ion irradiation; Sol gel; Thin films

Indexed keywords

HYBRID ORGANIC/INORGANIC SOL-GEL; IRRADIATED FILM; METHYLTRIETHOXYSILANE;

ELASTIC MODULI; HEAT TREATMENT; ION BOMBARDMENT; NANOINDENTATION; POLYMERS; SILICON; SPIN COATING; SUBSTRATES; THIN FILMS;

SOL-GELS;

EID: 34447270305     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.04.045     Document Type: Article

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