A new MEMS optimal design method using case

Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference

Volumn 2, Issue , 2004, Pages 529-534

  Mamiya, Hiroki ^a   Ishikawa, Koji ^a   Yu, Qiang ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

CAE; CASE; MEMS; Optimal design; Surface micro machining

Indexed keywords

ATOMIC FORCE SENSORS; BIOMEDICAL SENSORS; OPTIMAL DESIGN; SURFACE MICRO MACHINING;

ACTUATORS; COMPUTER AIDED ENGINEERING; DATA REDUCTION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

COMPUTER AIDED SOFTWARE ENGINEERING;

EID: 4444291421     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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