Micromirror arrays fabricated by flip-chip assembly

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 68-79

  Michalicek, M Adrian ^a   Zhang, Wenge ^a   Harsh, Kevin F ^a   Bright, Victor M ^a   Lee, Y C ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; COMPOSITE MICROMECHANICS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; SEMICONDUCTING INDIUM; SEMICONDUCTOR DEVICE MODELS;

FLEXURE BEAM MICROMIRROR DEVICE; FLIP CHIP ASSEMBLY; INTERFEROMETRIC MICROSCOPE; MICROMIRROR ARRAYS; MICROMIRROR DEFLECTION; SILICON SURFACE MICROMACHINING;

FLIP CHIP DEVICES;

EID: 0033342933     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)