Multivariate statistical analysis for x-ray photoelectron spectroscopy spectral imaging: Effect of image acquisition time

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1579-1586

  Peebles, D E ^a   Ohlhausen, J A ^a   Kotula, P G ^a   Hutton, S ^b   Blomfield, C ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Kratos Analytical Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL COMPONENTS; CHEMICAL MAPPING; IMAGE ACQUISITION; PARALLEL IMAGING;

AUGER ELECTRON SPECTROSCOPY; DATA ACQUISITION; DELAY CIRCUITS; ELECTRON ENERGY LOSS SPECTROSCOPY; IMAGE PROCESSING; IMAGE QUALITY; IMAGING TECHNIQUES; MAPPING; MULTIVARIABLE SYSTEMS; PROBLEM SOLVING; SIGNAL TO NOISE RATIO; STATISTICAL METHODS; SURFACE STRUCTURE;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 4444247559     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1765134     Document Type: Conference Paper

References (19)

1. K. Artyushkova, A. Ferryman, J. Farrar, and J. E. Fulghum, J. Surf. Anal. 9, 332 (2002).
2. D. G. Watson, J. Surf. Anal. 5, 64 (1999).
3. J. A. Hunt and D. B. Williams, Ultramicroscopy 38, 47 (1991).
4. M. Prutton, D. K. Wilkinson, P. G. Kenny, and D. L. Mountain, Appl. Surf. Sci. 144-145, 1 (1999).
5. M. Prutton, Microsc. Microanal. Microstruct. 6, 289 (1995).
6. R. Browning, Surf. Interface Anal. 20, 495 (1993).
7. S. Oswald and S. Baunack, Surf. Interface Anal. 25, 942 (1997).
8. M. Jacka, J. Electron Spectrosc. Relat. Phenom. 114-116, 277 (2001).
9. M. C. Biesinger, P.-Y. Paepegaey, N. S. McIntyre, R. R. Harbottle, and N. O. Petersen, Anal. Chem. 74, 5711 (2002).
10. W. Willse and B. Tyler, Anal. Chem. 74, 6314 (2002).
11. B. Tyler, Appl. Surf. Sci. 203-204, 825 (2003).
12. K. Artyushkova and J. E. Fulgham, J. Electron Spectrosc. Relat. Phenom. 121, 33 (2001).
13. K. Artyushkova and J. E. Fulgham, Surf. Interface Anal. 33, 185 (2002).
14. M. R. Keenan and P. G. Kotula, Patent # 6,584,413, issued 6/24/2003.
15. P. G. Kotula, M. R. Keenan, and J. R. Michael, Microsc. Microanal. 9, 1 (2003).
16. M. R. Keenan and P. G. Kotula, Surf. Interface Anal. 36, 203 (2004).
17. J. A. Ohlhausen, M. R. Keenan, P. G. Kotula, and D. E. Peebles, Proceedings of the 14th International Meeting on Secondary Ion Mass Spectrometry (SIMS XIV) (San Diego, CA, 9/14-19/2003).
18. M. R. Keenan (2003) in preparation; patent application filed (SNL SD7363).
19. S. Hutton, Kratos Analytical, personal communication.