Sputtering of aluminum cathodes on OLEDs using linear facing target sputtering with ladder-type magnet arrays

Journal of the Electrochemical Society

Volumn 155, Issue 7, 2008, Pages

  Moon, Jong Min ^a   Kim, Han Ki ^a  

^a Kumoh National Institute of Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; COOLING SYSTEMS; ORGANIC LIGHT EMITTING DIODES (OLED); PLASMA DENSITY; SPUTTERING; THERMAL EVAPORATION;

ALUMINUM CATHODES; FACING TARGET SPUTTERING (FTS); LADDER-TYPE MAGNET ARRAYS; SUBSTRATE TEMPERATURE;

CATHODES;

EID: 44349100601     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2908864     Document Type: Article

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