RF MEMS capacitive switch on semi-suspended CPW using low-loss high-resistivity silicon substrate

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1039-1042

  Fernandez Bolanos M ^a   Perruisseau Carrier, J ^a   Dainesi, P ^a   Ionescu, A M ^a  

^a EPFL   (Switzerland)

Author keywords

High resistivity silicon (HRS); Microwave losses; RF MEMS switch; Semi suspended CPW; Surface passivation HRS; Titanium oxide (TiO2)

Indexed keywords

COPLANAR WAVEGUIDES; MEMS; PERMITTIVITY; SILICON COMPOUNDS;

HIGH RESISTIVITY SILICON (HRS); MICROWAVE LOSSES; RF MEMS SWITCH;

ELECTRIC SWITCHES;

EID: 44149115003     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.093     Document Type: Article

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