Modeling of periodic distributed MEMS - Application to the design of variable true-time delay lines

IEEE Transactions on Microwave Theory and Techniques

Volumn 54, Issue 1, 2006, Pages 383-392

  Perruisseau Carrier, Julien ^a   Fritschi, Raphaël ^a   Crespo Valero, Pedro ^a,b   Skrivervik, Anja K ^a,c  

^a EPFL   (Switzerland)

^b UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

^c Universidad Complutense de Madrid ^*  (Switzerland)

Author keywords

Distributed microelectromechanical systems transmission line (DMTL); Microelectromechanical systems (MEMS); Periodic structure; True time delay lines (TTDLs)

Indexed keywords

CIRCUIT MODEL; PERIODIC STRUCTURE THEORY; SHUNT CAPACITORS;

DELAY CIRCUITS; MICROWAVES;

MICROELECTROMECHANICAL DEVICES;

EID: 31044442109     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2005.860297     Document Type: Conference Paper

References (22)

1. D. Mercier, J.-C. Orlianges, T. Delage, C. Champeaux, A. Catherinot, D. Cros, and P. Blondy, "Millimeter-wave tune-all bandpass filters," IEEE Trans. Microw. Theory Tech., vol. 52, no. 4, pp. 1175-1181, Apr. 2004.
2. N. S. Barker and G. M. Rebeiz, "Optimization of distributed MEMS transmission lines phase shifters, U-band and W-band designs," IEEE Trans. Microw. Theory Tech., vol. 48, no. 11, pp. 1957-1966, Nov. 2000.
3. B. Lakshminarayanan and T. Weller, "MEMS phase shifters using cascaded slow-wave structures for improved impedance matching and/or phase shift," in IEEE MTT-S Int. Microwave Symp. Dig., Jun. 2004, pp. 725-728.
4. H.-T. Kim, J.-H. Park, S. Lee, S. Kim, J.-M. Kim, Y.-K. Kim, and Y. Kwon, "V-band 2-b and 4-b low-loss and low-voltage distributed MEMS digital phase shifter using metal-air-metal capacitors," IEEE Trans. Microw. Theory Tech., vol. 50, no. 12, pp. 2918-2923, Dec. 2002.
5. J. S. Hayden and G. M. Rebeiz, "Low-loss cascadable MEMS distributed X-band phase shifters," IEEE Microw. Guided Wave Lett., vol. 10, no. 4, pp. 142-144, Apr. 2000.
6. J. Perruisseau-Carrier, R. Fritschi, and A. K. Skrivervik, "Design of enhanced multi-bit distributed MEMS transmission lines," in IEEE Prime 2005, Lausanne, Switzerland, 2005, pp. 163-166.
7. A. Hajimiri, A. Komijani, A. Natarajan, R. Chunara, X. Guan, and H. Hashemi, "Phased array systems in silicon," IEEE Commun. Mag., vol. 42, no. 8, pp. 122-130, Aug. 2004.
8. L. Brillouin, Wave Propagation in Periodic Structures. New York: Dover, 1953, ch. 9, pp. 193-226.
9. R. E. Collin, Foundations for Microwave Engineering, 2nd ed. New York: McGraw-Hill, 1992, ch. 8, pp. 550-571.
10. D. M. Pozar, Microwave Engineering. Reading, MA: Addison-Wesley, 1990.
11. M. J. W. Rodwell, S. T. Y. Allen, R. Y. Yu, M. G. Case, U. Bhattacharya, M. Reddy, E. Carman, M. Kamegawa, Y. Konishi, J. Pusl, and R. Pullela, "Active and nonlinear wave propagation devices in ultrafast electronics and optoelectronics," Proc. IEEE, vol. 82, no. 7, pp. 1037-1059, Jul. 1994.
12. K. Topalli, M. Unlu, H. Sagkol, S. Demir, O. A. Civi, S. Koc, and T. Akin, "A new model for distributed MEMS transmission lines," in IEEE AP-S Symp., Jun. 20-25, 2004, pp. 2855-2858.
13. M. I. Skolnik, Radar Handbook. New York: McGraw-Hill, 1970, ch. 11, pp. 43-44.
14. G. M. Rebeiz, RF MEMS, Theory, Design and Technology. New York: Wiley, 2003, ch. 10, pp. 297-328.
15. A. S. Nagra and R. A. York, "Distributed analog phase shifters with low insertion loss," IEEE Trans. Microw. Theory Tech., vol. 47, no. 9, pp. 1705-1711, Sep. 1999.
16. S. Frédérico, C. Hibert, R. Fritschi, P. Flückiger, P. Renaud, and A. M. Ionescu, "Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architectures," in Proc. 16th IEEE Int. Micro Electro Mechanical Systems Conf., Kyoto, Japan, Jan. 2003, pp. 570-573.
17. 2 interface layer effects on microwave loss of high-resistivity CPW line," IEEE Microw. Guided Wave Lett., vol. 9, no. 1, pp. 10-12, Jan. 1999.
18. R. Fritschi, S. Frédérico, C. Hibeit, P. Flückiger, P. Renaud, D. Tsamados, J. Boussey, A. Chovet, R. K. M. Ng, F. Udrea, J.-P. Curty, C. Dehollain, M. Declercq, and A. M. lonescu, "High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining," Microelectron. Eng., vol. 73-74, pp. 447-451, Jun. 2004.
19. J.-J. Hung, L. Dussopt, and G. M. Rebeiz, "Distributed 2- and 3-bit W-band MEMS phase shifters on glass substrates," IEEE Trans. Microw. Theory Tech., vol. 52, no. 2, pp. 600-606, Feb. 2002.
20. R. N. Simons, Waveguide Circuits, Components, and Systems. New York: Wiley, 2001, ch. 2, pp. 11-33.
21. S. Ramo, J. R. Whinnery, and T. Van Duzer, Fields and Waves in Communication Electronics, 2nd ed. New York: Wiley, 1967, ch. 5, pp. 298-301.
22. R. B. Marks and D. F. Williams, "Characteristic impedance determination using propagation constant measurement," IEEE Microw. Guided Wave Lett., vol. 1, no. 6, pp. 141-143, Jun. 1991.