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Volumn 19, Issue 8-9, 2008, Pages 678-681

A study of vacancies and vacancy pair defects in 4H SiC grown by halide chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CHEMICAL VAPOR DEPOSITION; DEFECTS; ELECTRON ENERGY LEVELS; IONIZATION; PARAMAGNETIC RESONANCE; PHOTONS; SILICON CARBIDE;

EID: 44149107343     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9378-2     Document Type: Conference Paper
Times cited : (1)

References (11)
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    • Electron Paramagnetic Resonance
    • 5. J.A. Weil J.R. Bolton J.E. Wertz 1994 Electron Paramagnetic Resonance John Wiley & Sons Inc, N.Y J.A. Weil, J.R. Bolton, J.E. Wertz, Electron Paramagnetic Resonance (John Wiley & Sons, Inc, N.Y., 1994)
    • (1994)
    • Weil, J.A.1    Bolton, J.R.2    Wertz, J.E.3
  • 6
    • 0000545643 scopus 로고    scopus 로고
    • 6. P.J. M.E. Macfarlane Zvanut 2000 J. Appl. Phys. 88 4122 10.1063/1.1311810 P.J. Macfarlane M.E. Zvanut, J. Appl. Phys. 88, 4122 (2000)
    • (2000) J. Appl. Phys. , vol.88 , pp. 4122
    • Macfarlane Zvanut, P.J.M.E.1
  • 8
    • 2342516065 scopus 로고    scopus 로고
    • 8. T. Umeda J. Isoya N. Morishita T. Ohshima T. Kamiya 2004 Phys. Rev. B. 69 121201 10.1103/PhysRevB.69.121201 1:CAS:528:DC%2BD2cXivFOrsbk%3D T. Umeda, J. Isoya, N. Morishita, T. Ohshima, T. Kamiya, Phys. Rev. B. 69, 121201 (2004)
    • (2004) Phys. Rev. B. , vol.69 , pp. 121201
    • Umeda, T.1    Isoya, J.2    Morishita, N.3    Ohshima, T.4    Kamiya, T.5
  • 10
    • 79956048864 scopus 로고    scopus 로고
    • 10. M.E. V.V. Zvanut Konovalov 2002 Appl. Phys. Lett. 80 410 10.1063/1.1432444 1:CAS:528:DC%2BD38XlsFektw%3D%3D M.E. Zvanut V.V. Konovalov, Appl. Phys. Lett. 80, 410 (2002)
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 410
    • Zvanut Konovalov, M.E.V.V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.