Relationship between the EPR SI-5 signal and the 0.65 eV electron trap in 4H- and 6H-SiC polytypes

Materials Science Forum

Volumn 527-529, Issue PART 1, 2006, Pages 547-550

  Garces, N Y ^a   Carlos, W E ^a   Glaser, E R ^a   Huh, Sung Wook ^b   Jae, Hun ^b   Chung, Saurav Nigam ^b   Polyakov, A Y ^b   Skowronski, M ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

DLTS; Electron paramagnetic resonance

Indexed keywords

DEEP LEVEL TRANSIENT SPECTROSCOPY; ELECTRON TRAPS; SILICON CARBIDE;

SIC POLYTYPES;

PARAMAGNETIC RESONANCE;

EID: 33846974459     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-425-1.547     Document Type: Conference Paper

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