Structure analysis of SiCGe films grown on SiC

Surface and Interface Analysis

Volumn 40, Issue 5, 2008, Pages 935-938

  Li, Lianbi ^a   Chen, Zhiming ^a   Lin, Tao ^a   Pu, Hongbin ^a   Li, Jia ^a   Li, Qingmin ^a  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Hot wall chemical vapor deposition; Island growth; SiC; SiCGe

Indexed keywords

FILM GROWTH; LOW TEMPERATURE OPERATIONS; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; TWO DIMENSIONAL;

HOT-WALL CHEMICAL VAPOR DEPOSITION; ISLAND GROWTH; PROCESSING PARAMETERS; STRANSKI-KRASTANOV (SK) MODE;

THIN FILMS;

EID: 44149087359     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2806     Document Type: Article

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