Analysis and design of temperature field of SiCGe alloy growth by hot-wall chemical vapor deposition on SiC substrates

Rengong Jingti Xuebao/Journal of Synthetic Crystals

Volumn 33, Issue 5, 2004, Pages 712-716

  Pu, Hong Bin ^a   Chen, Zhi Ming ^a   Li, Liu Chen ^a   Feng, Xian Feng ^a   Zhang, Qun She ^a   Wo, Li Min ^a   Huang, Yuan Yuan ^a  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Finite element; Hot wall CVD; Induction heating; SiCGe; Temperature field

Indexed keywords

EID: 10444234252     PISSN: 1000985X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)